I need to polish samples covered with alumina (ALD grown) down to 1nm rms roughness or less. The underneath substrate is SiO2, and the etch rate of alumina should be slow enough (a few nm per minute). The samples are small chips (5x5mm or 15x15mm) Does anybody know a company in the bay area which could do this job?
Thank you very much for your help!
Francois
No comments:
Post a Comment