Re: STS nitride recipe

Robin,

The orders for all the new tools just went out a few weeks and we are
still working on where they will be positioned. It is looking like serval
of existing tools will need to be moved. Once what we have settled on the
positions and what has to be moved, we can start figuring what all has to
be done and how long it will take. At this point it would be foolish to
commit to a date when the new tools will be available to users. We are
hoping they will be up by the end of summer but the permitting and details
will dicate the true date.

Jim

On Mon, 1 Mar 2010, Robin King wrote:

> Can someone tell us the expected date for it to be installed, characterized and available to users? That would be useful info, thanks.
>
> --- On Mon, 3/1/10, Jim McVittie <mcvittie@cis.Stanford.EDU> wrote:
>
> > From: Jim McVittie <mcvittie@cis.Stanford.EDU>
> > Subject: Re: STS nitride recipe
> > To: "Tracy Fung" <tfung@silexos.com>
> > Cc: labmembers@snf.stanford.edu
> > Date: Monday, March 1, 2010, 11:27 AM
> > Tracy,
> >
> > The SNF has just ordered a low temperature PECVD system
> > from Plasma-Therm
> > which deposits nitride at below 100C using N2 with SiH4.
> > The Tool will be
> > delivered in June. It also has a low temp oxide dep
> > process.
> >
> >     Jim
> >
> > On Mon, 1 Mar 2010, Tracy Fung wrote:
> >
> > > Does anyone have experience with recipes for silicon
> > nitride using STS
> > > PECVD? 
> > >
> > > I'm currently using the standard ammonia recipe, are
> > there any other
> > > standard recipes that uses nitrogen?
> > >
> > > 
> > >
> > > Tracy Fung
> > >
> > > 
> > >
> > >
> >
> > --
> > --------------------------------------------------------------
> > James (Jim) P. McVittie, Ph.D.     
> >       Sr. Research Scientist
> > Paul G. Allen Building         
> >         Electrical Engineering
> > Stanford Nanofabrication Facility   
> >    jmcvittie@stanford.edu
> > Stanford University         
> >        Office: (650) 725-3640
> > Rm. 336X, 330 Serra Mall   
> >     Lab: (650) 721-6834
> > Stanford, CA 94305-4075   
> >         Fax: (650) 723-4659
> >
> >
> >
>

--
--------------------------------------------------------------
James (Jim) P. McVittie, Ph.D. Sr. Research Scientist
Paul G. Allen Building Electrical Engineering
Stanford Nanofabrication Facility jmcvittie@stanford.edu
Stanford University Office: (650) 725-3640
Rm. 336X, 330 Serra Mall Lab: (650) 721-6834
Stanford, CA 94305-4075 Fax: (650) 723-4659