Re: STS nitride recipe

Tracy,

The SNF has just ordered a low temperature PECVD system from Plasma-Therm
which deposits nitride at below 100C using N2 with SiH4. The Tool will be
delivered in June. It also has a low temp oxide dep process.

Jim

On Mon, 1 Mar 2010, Tracy Fung wrote:

> Does anyone have experience with recipes for silicon nitride using STS
> PECVD?
>
> I'm currently using the standard ammonia recipe, are there any other
> standard recipes that uses nitrogen?
>
>
>
> Tracy Fung
>
>
>
>

--
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James (Jim) P. McVittie, Ph.D. Sr. Research Scientist
Paul G. Allen Building Electrical Engineering
Stanford Nanofabrication Facility jmcvittie@stanford.edu
Stanford University Office: (650) 725-3640
Rm. 336X, 330 Serra Mall Lab: (650) 721-6834
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