P5000 Email Log
Monday, November 3, 2008
Re: Shutdown p5000etch SNF 2008-10-31 21:33:07: i/o handler error
Cycled 24 wafers using the blue cassette labeled with an "A" on the Cassette A platform with no problems. Tried to cycle wafers using the unmarked blue cassette on the Cassette A platform but had two "I/O sensor blocked" faults.
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