stable recipe for Schottky contacts on n-type Si?

Hello all:
Does anyone have a good, repeatable recipe for making Schottky
contacts to n-type Si? I have been using shadow-masking to pattern Cr
and Al contacts on n-type SOI, and the dark I-V characteristics of my
diodes change with time (as does the photoresponse). A lot of the
literature suggests using Al, but with a work function about equal to
the conduction band level of Si, that seems like a bad choice, and the
diodes I have made with Al look unsurprisingly ohmic and highly
variable from diode to diode (anywhere from nA to µA of dark current
at 1V). Am I just that bad at microfabbing? :-)

Any suggestions people have for any deposition and annealing steps
would be greatly appreciated. Thanks in advance for your help!

Sincerely,
Alex