Re: Shutdown p5000etch SNF 2008-04-30 00:37:37: Wafer fell off blade in machine

Broken wafer in Ch.B. Also heavy resist build-up in the chamber. Wet cleaned the chamber and adjusted the wafer hand-off position. Changed syscon 4080 from 3 to 7 and syscon 4081 from 2 to 6. Ran 16 wafers using Jim OX at 60 Gauss with no problems.