P5000 Email Log
Thursday, May 1, 2008
Re: Problem p5000etch SNF 2008-04-29 13:10:40: chamber B magnet fault
Changed syscon 4080 from 3 to 7 and syscon 4081 from 2 to 6. Ran 16 wafers using JimOx recipe at 60 gauss with no problems.
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