Re: Problem p5000etch SNF 2007-12-18 10:50:18: My wafer is inside the machine

Recovered wafer from storage elevator.

Problem p5000etch SNF 2007-12-18 10:50:18: My wafer is inside the machine

It shows that my wafer is in the elevator, but it cannot sense the wafer. Please save my wafer...

Comment p5000etch SNF 2007-12-16 07:42:54: Chamber B

The turbo pump controller smoked(transformer shorted)
chamber b will be down for a while, we don't have a spare
controller in our stock.

Problem p5000etch SNF 2007-12-15 01:00:55: ChB down

When I was about to load my wafers we all heard a loud blast from p5000 followed by a smell of burnt bakelite. Ericp was there and he concluded after some inspection that the problem was possibly related to some electrical circuit/cable and put chamber B offline. Ch A and Ch C seems to work fine. I used Ch C after that without any problem.

Problem p5000etch SNF 2007-12-15 00:20:08: ch B down

Problem p5000etch SNF 2007-12-15 00:02:50: Ch.B offline

Something seems to blow up.

Re: Problem p5000etch SNF 2007-12-13 19:13:04: Ch.C high He leak rate

User loaded same wafer and he leak was ok.

Comment p5000etch SNF 2007-12-13 23:14:11: Ch.C is OK

Leak rate back to normal

Problem p5000etch SNF 2007-12-13 19:13:04: Ch.C high He leak rate

Re: Comment p5000etch SNF 2007-12-10 10:23:20: Chamber C slit door actuator is sticking.

Re: Comment p5000etch SNF 2007-12-07 21:51:37: recovered wafer from B

Re: Comment p5000etch SNF 2007-12-07 13:31:57: Ch C Online

Re: Comment p5000etch SNF 2007-12-13 02:42:06: Wafer stuck in chamber B

Re: Problem p5000etch SNF 2007-12-13 01:23:17: wafers stuck

Robot stepper drivers lose communication, had shut
off 48v and manually move robot to position and intialized
after.

Comment p5000etch SNF 2007-12-13 02:42:06: Wafer stuck in chamber B

Problem p5000etch SNF 2007-12-13 01:23:17: wafers stuck

The handler is stuck in Chamber B. 1 wafer in the chamber and 5 wafers on the elevator. I am not red-lighting in case someone can fix it before the morning.

Re: Problem p5000etch SNF 2007-12-12 02:58:10: Helium leak problem and broken wafer in chamber

Re: Comment p5000etch SNF 2007-12-12 08:54:12: No problem found on any of the two chamber D and C,

No wafer found on chamber b or c.

Comment p5000etch SNF 2007-12-12 08:54:12: No problem found on any of the two chamber D and C,

Problem p5000etch SNF 2007-12-12 02:58:10: Helium leak problem and broken wafer in chamber

Chambers B and C both ahd helium leak problems and there is a broken wafer in Chamber C. I did not red light since other chambers may be used. I have put a warning for Ch. C on the machine.

Comment p5000etch SNF 2007-12-11 16:29:11: Ch.A metal etch worked, but finicky

I ran some test wafers and two device wafers thru Chamber A (metal timed etch). Worked, but machine was finicky and required frequent intervention by Cesar to maintain correct servo pressure. Also, Ch. A recipes wouldn't communicate with endpt PC so we had to use fixed-time etch (i.e. 'no endpoint') option on all steps.

Re: Problem p5000etch SNF 2007-12-07 17:04:11: Wafer Lost

Re: Problem p5000etch SNF 2007-12-05 12:44:14:

Re: Problem p5000etch SNF 2007-12-07 12:03:51: Ch.C is offline

Re: Shutdown p5000etch SNF 2007-12-11 09:02:29: Slit door problem on chamber C..

All chamber's are back online. Repaired bad slit door
on chamber C and replaced 2amp fuse ob chamber A.
Cycled wafer on all three chambers.

Re: Problem p5000etch SNF 2007-12-10 03:04:31:

Re: Problem p5000etch SNF 2007-12-10 03:05:58: ChC

Shutdown p5000etch SNF 2007-12-11 09:02:29: Slit door problem on chamber C..

Comment p5000etch SNF 2007-12-10 10:23:20: Chamber C slit door actuator is sticking.

Problem p5000etch SNF 2007-12-10 03:05:58: ChC

ChC couldn't load wafers, the chamber door wouldn't open in time. Also ChC went offline in the middle of processing!!!!!

Problem p5000etch SNF 2007-12-10 03:04:31:

P5000 had problem loading wafers into Chamber C...the chamber door wouldn't open in time. ChC went offline in the middle of processing!!!!!!!

Comment p5000etch SNF 2007-12-07 21:51:37: recovered wafer from B

The wafer has been recovered from Ch.B.
However, the following problems still exist:
* The clamp needs to be replaced in B. It looks to me
like the wafer may have broken because of the worn clamp.
* The robot still gets lost. (Cesar will repair next week).
* E/E door still sticky. (;arts on order? I think).
* Ch.A still offline- unsure why.

Problem p5000etch SNF 2007-12-07 17:04:11: Wafer Lost

machine will not return wafer. There is possibly a broken piece of the wafer still on the elevator, or the entire wafer is in chamber b. we would redlight, but don't want to take the machine down for the weekend. hopefully someone (ericp?) will know what to do to get the partial wafer out... otherwise in need of a redlight.

Comment p5000etch SNF 2007-12-07 13:31:57: Ch C Online

It's been re-enabled.
Ekin

Problem p5000etch SNF 2007-12-07 12:03:51: Ch.C is offline

Re: Comment p5000etch SNF 2007-12-04 15:34:08: Update

Re: Shutdown p5000etch SNF 2007-12-06 12:18:45: Wafer stuck in chamber C

chamber i/o did opened, adjusted door speed(open)
and recovered wafer from chamber.

Shutdown p5000etch SNF 2007-12-06 12:18:45: Wafer stuck in chamber C

I was etching 4 wafers in chamber C. 2 wafers etched without problem, but the third wafer did not come out of Chamber C. I got an error message "Cannot close I/O slit valve, blade may be in it." The blade is not stuck in the slit so it must be another problem. I tried to "Home all robot axes" but it could not recover the 3rd wafer.

Re: Comment p5000etch SNF 2007-12-04 00:24:38: cleared the wafer

Re: Comment p5000etch SNF 2007-11-27 07:56:20: Ch.C down for high He leak rate

Re: Comment p5000etch SNF 2007-12-05 19:18:40: Update Ch.B pressure problem

Re: Problem p5000etch SNF 2007-12-05 17:58:57: chamber B pressure down

Solenoid got disconnected. connected solenoid power
and tested pressure @100.200 and 250.

Comment p5000etch SNF 2007-12-05 19:18:40: Update Ch.B pressure problem

Manometer's pneumatic isolation valve is not opening. The air line that actuates the valve is not pressurizing. Need to troubleshoot further.

Problem p5000etch SNF 2007-12-05 17:58:57: chamber B pressure down

Chamber B pressure doesn't reach the setpoint 250 mTorr and is stuck at around 20 mTorr.

Re: Shutdown p5000etch SNF 2007-11-30 17:40:05: Wafer stuck while unloading

Repaired broken wire on ribbon for rotation/extension
and replaced bad solenoid for i/o door (open) imtermittenly
does not close. Also, repaired broken wire for chamber
C slit door not open sensor. Chamber is is shutdown
missing 24v , 2amp fuse on chamber interface module
is opened, i will change it tommorow.

Problem p5000etch SNF 2007-12-05 12:44:14:

Found chamber A offline this morning and half atm interlock
is on, don't know what happen and no comment on coral.
will need to troubleshoot after we fix the robot and i/o door
problem.

Re: Problem p5000etch SNF 2007-11-30 15:51:41: Chamber B He Leak Rate Too High

Replaced pin lip seal. Ran 8 wafers with no chamber problem.

Comment p5000etch SNF 2007-12-04 15:34:08: Update

The bottom line is the that the system is runable with maintenance assistance.
Ch.B- Replaced pin lip seals. Now leak rate is less than 0.5 sccm. Ran 8 wafers with no chamber problems.
Loadlock I/O door- The pneumatic cylinders that actuate the i/O door works intermittently but will need to be replaced. The door opens fine but most of the time , it fails when it tries to close. The door can be pushed close and the system will continue to run until it needs to close again when it goes into standby.
We will order new pneumatic cylinders tomorrow but in the mean time, the system can only be run with maintenance assistance because of the inherent danger of closing the I/O door manually.

Comment p5000etch SNF 2007-12-04 00:24:38: cleared the wafer

I unloaded the stuck wafer. Tried to run some wafers through, but got a few (recoverable) errors:
1). I/O slit valve is sticking- get an error, but it eventually closes on its own.
2). Robot extension position unknown.