Comment p5000etch SNF 2012-11-21 20:56:17: Ch B. rates

jim-ox on 955 resist
11/21/12: 2.71nm/s
10/11/12: 2.55 nm/s
jim-ox on fused silica:
11/21/12: 4.41nm/s
04/04/12: 4.36 nm/s
Seems good to me, I would check your recipe to make sure it's what you expected it to be.