Problem p5000etch SNF 2012-09-09 16:20:05: wafer slips during transfer from load lock

While unloading double polished wafers from load lock to cassette, the arm does not set the wafers properly on the cassette (wafer is still tilted) and pulls the unloaded wafer back into the load lock, causing the wafer to slip. Unloading is alright for single-side polished wafers. Could we have the robot handler checked?