Cu electroplating

Dear labmembers,

 

I would like to fill the through wafer via by using Cu electroplating process.

 

Is there anyone who has done the similar process before, or who has purchased some "ready to use" copper plating solutions from a vendor?

 

I really appreciate if you would share with me some experiences about the Cu electroplating.

 

Thanks so much for the help.

 

Yue