Gases for CL96

All gases related to CL96 have been turned off for the weekend. . Parts
for repair should be here early Monday. Gases include: Arsine, B2H6,
Phosphine, and Silane for Epi. Silane for Tylan and Thermco LTOs. Silane
for STS. Silane for ICP and CCP. So the tools that are down are : Epi,
ICP, CCP Tylan and Thermco LPs , STS dep. Sorry for any inconvenience . Ted