Monday, August 6, 2012

Fwd: TGO Testing Monday Aug. 6th

Just a reminder for all. Thanks for your patience. Ted


-------- Original Message --------
Subject: TGO Testing Monday Aug. 6th
Date: Tue, 31 Jul 2012 09:49:27 -0700
From: Ed Myers <edmyers@stanford.edu>
To: labmembers@snf.stanford.edu
CC: Aaron McCarthy <amccarth@stanford.edu>


All,    We are tentatively scheduled for the County to come in Monday afternoon   (1pm-5pm) and test our Toxic Gas Monitoring changes associated with the   new etcher installation.  The county will want to see live gas   challenges, which will lead to shutdown of our hazardous gases.  This   will be very dissruptive since it will effect the gas supplies all the   etcher, epi, LPVCD, PECVD, etc.  Once I receive confirmation as to the   time of the visit, I will make blocking reservations on all the tools   which will be effected.    While I know how disruptive this is, it is also very good news for those   waiting for the new etcher to come on line.  We must pass this   inspection before we can turn on the process gases.  Once we can turn on   the process gases, the process engineers can come in and do the final   start-up and qualification on the four new etchers.    Regards,  The SNF Staff  



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