-------- Original Message --------
| Subject: | TGO Testing Monday Aug. 6th |
|---|---|
| Date: | Tue, 31 Jul 2012 09:49:27 -0700 |
| From: | Ed Myers <edmyers@stanford.edu> |
| To: | labmembers@snf.stanford.edu |
| CC: | Aaron McCarthy <amccarth@stanford.edu> |
All, We are tentatively scheduled for the County to come in Monday afternoon (1pm-5pm) and test our Toxic Gas Monitoring changes associated with the new etcher installation. The county will want to see live gas challenges, which will lead to shutdown of our hazardous gases. This will be very dissruptive since it will effect the gas supplies all the etcher, epi, LPVCD, PECVD, etc. Once I receive confirmation as to the time of the visit, I will make blocking reservations on all the tools which will be effected. While I know how disruptive this is, it is also very good news for those waiting for the new etcher to come on line. We must pass this inspection before we can turn on the process gases. Once we can turn on the process gases, the process engineers can come in and do the final start-up and qualification on the four new etchers. Regards, The SNF Staff
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