Hi Members,
We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at 2:03pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything.
We waited until the two cabinets were out of alarm status before letting users back into the lab.
The lab was closed from 2:02 until 3:10.
The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms.
We will send another update once we have more information.
-m
--
maurice@stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
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