Re: Ru deposition

Hi Scott,
I've used this company for interesting material needs.
http://lebowcompany.com/

They are amazing.
Good luck, Betty Young (Physics)

----- Original Message -----
From: "Scott Lee" <wslee@stanford.edu>
To: labmembers@snf.stanford.edu
Sent: Tuesday, June 5, 2012 2:46:22 PM
Subject: Ru deposition

Hi all,


I need to deposit about 20-50nm Ru ideally by ALD or CVD but sputtered Ru could also work. Does anyone have a source for depositing Ru or have experience with a company who deposits a wide array of thin films?


Thanks,
Scott