P5000 Email Log
Thursday, June 7, 2012
H2O2 etch photoresist rate
Hi all,
Does anyone know the etch rate of photoresist (for example, 3612) in H2O2 ?
Thanks a lot!
Sincerely yours,
Liangliang
-------------------------
Liangliang Zhang
Ph. D candidate,
Electrical Engineering,
Stanford University
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