None of the tubes in that cabinet were running at the time of the
incident. We were cleaning a gate valve from the ThermcoNitride tube in
the back service area near the POCl3 cabinet.
This is the third POCl3 alarm that we have had in the last week. The
warning/alarm level for this POCl3 sensor was lowered after installing
the new TGO system. Saturday we shutdown tylan 5&6 (POCl3 & BBr doping)
until we get clarification on were the level should be set.
-m
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
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