Fwd: 10 micron limit on Thermcopoly

Dear SNF users, 

I would like to deposit thick polysilicon on our sapphire substrates in semi-clean boat that is located in the rear side of the tube. If you are planning to use thermcopoly (clean) this month, please let me know. We could probably run together with your choice of the recipe, since I only need polysilicon layer as a sacrificial layer. 

I would probably do my first deposition on Monday (Mar 5th), so please let me know as soon as possible. 

Thank you very much!

Best,

Jae

---------- Forwarded message ----------
From: maurice stevens <maurice@stanford.edu>
Date: Fri, Mar 2, 2012 at 8:33 AM
Subject: 10 micron limit on Thermcopoly
To: Jae Hyung Lee <jaehlee@stanford.edu>
Cc: tberg@snf.stanford.edu, Ray Seymour <rseymour@stanford.edu>


Hi Jae,

You can do up to 10um of poly in ThermcoPoly this month.

You must send an email out to the users asking if they want to put wafers in you runs.  Don't want other users running thick depositions with in the same month.
I strongly suggest that you break the deposition into shorter depositions and rotate your wafers (put this in your email to the users).
I also suggest that you inspect the boats between runs.  They can break or the slots can close up and pinch wafers.

If the tube breaks during your runs, Ted and Ray will not give you a Christmas card…but they will kill me.


-m