We are wrapping up another term -- and another session of EE412. Final
presentations will be given on Tuesday, Dec. 13, starting at 4 pm in the
AllenX Auditorium. Please come and see what your fellow labmates have
been up to. And be inspired to sign up for Spring term (when there will
be even more new tools to characterize!)
The agenda is as follows:
3:40-4:00 -- Pizza
4:00-4:10 -- A few words from our Instructors
4:10-4:35 -- Shane Crippen: Characterizing the Innotec for Sidewall
Electrodes Using Shadow Mask.
4:35-5:00 -- Tom Gwinn: Developing an Anisotropic Plasma Etch Process
for Thick Tungsten in the P5000
5:00-6:00 -- Insun Park, Young Ik Sohn, and Joo Yong Sim:
Characterization of Fiji ALD Film Quality and Conformality in High
Aspect Ratio/Deep Etched Structures
Check out what previous sessions of EE412 have accomplished by going to
the SNF wiki at:https://snf.stanford.edu/SNF/processes/ee412/
Hope to see you there --
Your EE412 Instructors
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
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