Process cooling water is back on. Maintenance crew is working in the
lab to bring tools up. Here's a summary:
- Work is being done on the network. Sunray Coral is fine (internal
network.) Access to remote Coral and SNF emails may be spotty.
- ASML, innotec, metalica, gryphon so far look on track to be up soon.
ETA is around 1 pm. (Thanks Gary & Jim).
- Amtetcher is down hard; heat exchanger pump didn't survive.
P5000etch, mrc, and lampoly are up or nearly so. Stsetch2 is getting
there (Thanks Cesar!)
Many thanks also to Tony Padilla, the Facilities tech who came in both
last night and this morning to check on the water.
Mary
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
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