We've just been informed that there's a cooling water problem throughout
the campus. There is flow, but the temperature is high. It is also
possible that there are irregularities in flow. Tools using cooling
water will not function if temperature and flow are not within certain
limits and will stop processing. Facilities believes the problem will
be resolved within a couple of hours. In the meantime, we have several
reports of tools with turbo and RF failure. The ASML will not reboot.
These are all likely due to the cooling water problem. Once the water
is brought back into spec, most tools will reset themselves. In the
meantime, please do not override or clear errors, or reboot tools that
make use of cooling water -- the tools are protecting themselves.
Thanks,
Your SNF staff
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