Sorry to spam. I am doing a KOH etch from the backside of the wafer. But my front side of wafer has Al, which can't survive in a long time KOH etch. I am wondering if anyone have proTEK (http://www.brewerscience.com/products/protective-coatings) or have used the proTEK before to protect the frontside of the wafer? Any comments and suggestions are welcomed.
Best,
Helen
Qiushi(Helen) Ran
=========================================
Department of Electrical Engineering
Stanford University, Stanford, CA 94305.
Mobile: +1-650-796-1439
Email: qran@stanford.edu
No comments:
Post a Comment