Problem p5000etch SNF 2011-11-24 04:33:57: Ch. C handler timeout

After processing in Ch C (Si), wafers took a long time to come out, sometimes with timeout errors:
"Ch C valve did not open in maximum allowed time"
"Ch C wafer lifter did cannot reach release position within timeout"
"Process chamber failed with error code 236"
Had to abort automatic mode and manually return the wafers. Chamber was also sometimes stuck "waiting for blade in" and had to be reset.