with assistance from mike dickey, scott lee, and chaitanya gupta we got the new fiji3 ald system into the snf this morning. you will see it sitting by the epi2. it is still on its moving wheels to accommodate easy positioning, so note that it is not anchored down yet. we expect this tool to be outfitted and come online in the spring of 2012 to complement the other ald systems by providing more ald (plasma or thermal) of oxides with an open cleanliness classification similar to fiji2.
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