Dummy HSQ-patterned samples

Hi SNF users,

I'm wondering if anyone has any samples patterned with ebeam using negative-resist HSQ. I'm not sure what thicknesses are common, but greater than 300nm is desired. Samples will be etched.

Thanks,

Robert Chen
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
http://robochen.web.stanford.edu