Friday, October 14, 2011

Re: Problem p5000etch SNF 2011-10-13 13:51:28: BCL3

Tests look good. Nice clean etch, pretty trace on end point, clearing at 110 secs.
I did have to turn on the heat exchangers at the start and once they go to temp they turned off for low flow. I turned them back on and they were fine for the tests. Flow showed OK.

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