Thursday, October 6, 2011

Re: Problem p5000etch SNF 2011-10-05 16:14:17: Needs NF3 process qual

Since NF3 is primarily used as a cleaning for CH C there is no standard qual for it. Did test amtetcher and results were as expected. This at least indicates that NF3 is NF3. Doesn't say much about delivery to p5000, but it is the correct gas at the cylinder.....

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