Right now, we should have all gases back online except for germane for
tylansige and thermcopoly1/2. (Epi2 germane is OK.) The toxic gas
detector for this particular cylinder failed so all the gases in the
vault were shut off for a little while.
Let me know if you observe any gas problems.
Mary
On 10/21/2011 9:44 PM, Yuniarto Widjaja wrote:
> FYI, just saw a note from Mary posted on the lab entrance door that some of
> the flammable gas (SiH4, DCS, etc.) are out for the time being. Just
> thought of sending out this email since I didn't see any emails regarding
> this matter. The tools status doesn't seem to be updated yet on coral.
>
> Yuniarto
>
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
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