Litho solvent exhaust test for the litho area

Hello all,

This is to let you know that on Wednesday  8/24 at 7 am there will be some testing done on exhaust to find out the
lower and higher ( mostly up-sizing for SVG coaters)  limit of the existing exhaust draw.

We do not know how high the humidity will go and the spec for ASML is at 60% so we will shut down the system in the morning.

This work has been coordinated with AGC our facility and SNF and we will do our best to minimize the impact to the litho area.

Non Critical work can continue but I like to ask all the spinning resist for non critical process  be done prior to this time if all possible.


litho team