P5000 Email Log
Friday, May 27, 2011
Re: Shutdown p5000etch SNF 2011-05-27 09:12:03: handling
Mike removed the broken wafer chip,. We adjusted the wafer
handoff from storage elevator to chamber wafer drop, cycled
wafer from cassette elevator to chamber C w/out problem..
No comments:
Post a Comment
‹
›
Home
View web version
No comments:
Post a Comment