Question about Al etch

Hi all,

 

I want to etch Al on YSZ(Y:ZrO2) substrate. Al is 30nm thick, depositied by sputtering. Does anybody have good recipe to etch Al ?

also, does Al etchant etch Platinum too? I have some Pt on the substrate, and do not want it to be etched by Al etchant...

 

Thank you all!

Jihwan

--
Jihwan An
Ph.D. Candidate
Nanoscale Prototyping Laboratory (NPL)
Department of Mechanical Engineering
Stanford University, CA

cell : 650-862-0414
e-mail: jihwanan@stanford.edu