Protecting wafer edges during a Si etch in TMAH

Hi everyone,

Can someone suggest a good way to protect wafer edges during a Si
etch? My wafers are coming out with jagged edges and cannot undergo
further processing. I am planning to apply ProTEK B3 using Headway to
the edges of the wafer but I'm not sure if I will achieve good edge
coating. Does anyone have useful tips for such a process?

Thanks a lot,
Arunanshu