I had pressed "Run" for a conditioning run on the chamber, and came back a minute later to find my 4 wafers loaded, the load lock/chamber door still open, and the process not running. I unloaded all the wafers back into the loadlock following the instructions in Section 9, but couldn't press "Unload" to get them out. The machine now says that Ch. C is offline for maintenance and also won't let me rerun my recipe.
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