JC Doll was able to restart the turbo and put chamber C back on line. It has not been tested, however, so please run a test wafer to be certain.
Chamber B has been run successfully this morning (Sunday) and appears to be operating properly.
Chamber A is down. If I trace the vacuum lines properly, it does not have a functional vacuum pump and, as a result, will be down until Tuesday when the experts return.
Thanks,
John
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