Monday, May 30, 2011

Blue sticky tape as a mask during oxide etch

Hello labmembers,

I have previously used blue sticky tape as a mask for oxide etching at
the WbGen.
I now need to run a clean process and was wondering if the blue sticky
tape is compatible with clean processing.
Does anyone know if it is ok to use this tape in a clean process?

Sincerely,
Arunanshu

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