Regarding metal etching.

Hi All,

This is a question for all who are/will be interested in metal etching. We are in the process of nailing down the specs for a new inductively coupled plasma metal etcher for SNF.  I would like to solicit input from lab members as to what would be critical for them. 

In the wish list we already have the following:

Metals to be etched : 

 Au,Ag,Pt, Ti, Cr, Ni, Al

Wafer Size:

4" to pieces

Etch depth:

up to 400nm

Uniformity:

5%  over wafer

Roughness:

Shooting for <5nm rms. Seems like it varies a lot with metals and chemistry vs sputter etc.

Profile:

>85 deg

Selectivity:

Depends on chemistry and metal. Quite a range 

Please go ahead and add whatever you feel is important so that we can try to include it in the new system.

Thanks a lot,

Regards

Anu

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Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851