Nickel etching.

Hi y'all
Have anyone done any Nickel etching at SNF? Dry etching would
be prefered but I am not sure if any tool at SNF can do this w/out
contamination the etcher. Wet etching normally have HNO3 and I
am not sure how well the photoresist can handle the etchant.

If you did this before, please drop me a hint.

Thanks,
Dinh Ton