The senor monitoring the gas cabinet for the chlorine etch gas went
in to fault this morning. This type of event automatically shutdown
the gas cabinet, preventing any gas flow. I did not see any obvious
leak during my inspection of the cabinet.
I am leaving the cabinet shutdown, so no chlorine gas will be
available for the etch tools, such as PQuest, Lampoly and the
P5000. I placed a note on the door to the fab entrance, trying to
inform anyone planning on using the etch tools.
Regards,
SNF Staff
No comments:
Post a Comment