Good etch recipe for Ta?

Hi labmembers,

I'm using a structure with a Ta top layer. I've patterned it with SPR-955 and attempted to dry etch it using the Ar milling recipe developed on the MRC.

The milling is mostly trashing my resist instead of etching the Ta. I suspect there is a protective TaOx layer inhibiting the etch. Has anyone found a reactive etch that works for this metal?

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Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University