I accidentally put the Poly Etch recipe in B slot and selected C ONLY, so wafer was just sitting in the elevator in there. I put poly etch into slot C and hit RUN and nothing happened, and then realized it was in Manual mode, so I changed that to automatic and hit RUN, and it turned green, but it didn't seem like anything was happening, so I hit STOP (was it during pumpdown?), and recovered my wafer using the instructions. But now chamber C cannot do further processing. Sad.
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