TiO2 etching

Dear All,

Good afternoon!

Does anyone have experience in etching TiO2 (wet etching) ? Could you let me know about the solution you choose and the approximate etching rate?

Thanks a lot !

Sincererly yours,

Liangliang Zhang
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Ph.D. Candidate
School of Electrical Engineering
Stanford University
CA 94305, U.S.

Tel: 01-609-528-4962

M.S.

Institute of Microelectronics,
Peking University