Question on Pd Wet Etching

Dear labmembers,

 

I've found that Pd dissolves in HCl:HNO3 (3:1) in hot. Anybody knows about more detail on this, for example exact temperature and etch rate?

 

Thanks

 

Kyunghoae

 

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Kyung-Hoae Koo

PhD candidate

Stanford University

EE department