SIMS profiles of P diffusions

Hi Labmembers,

Do any of you have SIMS profiles of P diffusions performed in our POCl3 furnace (tylan6) in the temperature range 800C - 950C that you would be willing to share with me? I would like to compare them to SRA profiles I have to evaluate electrical activation.

Thanks,

nh

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Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
408-761-8651