Re: Comment p5000etch SNF 2010-07-25 20:16:39: still cannot run in Chamber A

A chamber usually goes offline if the users tries to run a recipe but forgets to select a chamber recipe.
Somebody placed the chamber back online. Ran 3 wafers with no problems.
To put a chamber back online:
1) Click on the SERVICE tab
2) Click on the VACUUM SERVICE button
3) Click on the blue chamber status button and select
ONLINE FOR PROCESS