Thursday, June 24, 2010

Shutdown p5000etch SNF 2010-06-24 16:21:40: Wafer stuck in Chamber C

Error message: wafer did not drop on bla\de from Ch. C.
Elmer: please help me take this wafer out. It is a VERY IMPORTANT wafer. So I want it out safely. : ) Thanks!
Sorry for the inconvenience.

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