Comment p5000etch SNF 2010-06-09 11:21:06: Ch C cleans to avoid wafer sticking

Folks,
An in-situ clean and seasoning of the chamber is recommended before you commit your valuable wafer to the etch. Here is the procedure;
Run the recipe CH.C CLEAN for 300s on a blank dummy wafer followed by at least 120s of the recipe you will be using.
This is recommended to clean the clamp fingers and reduce the chance of you wafers sticking to the clamp.