Problem p5000etch SNF 2010-05-03 10:17:02: DC bias on Ch.B

Ran five conditioning wafers with an eye on the DC bias. Results;
#1 -505 to -520
#2 -493 to -505
#3 -476 to -493 avr = 483
#4 -472 to -487 avr = -475
#5 -99 to -128 avr = -168 This wafer was ok (avr = -481) until 80 sec of the 120sec into recipe (CH.B OXIDE) then it dropped. Also, this wafer got stuck in the chamber.