Shutdown p5000etch SNF 2010-04-12 18:24:00: stage doesn't come back to original position and the screen turns black

In the end of the process, wafer stage didn't come back to the original position. I tried recovering process according to instruction, but when I clicked "Wafer -> Control Handler", the screen suddenly turned black and it didn"t work.
All of my wafers have been saved successfully.