You can use Au wet etchant. It is used to be available at SNF. May still be.
From: Kyunghoae Koo [mailto:koo1028@stanford.edu]
Sent: Wednesday, April 07, 2010 11:45 AM
To: labmembers@snf.stanford.edu
Subject: Pd etchant?
Hi All,
Any Pd wet etchant is available in SNF? Should I go with a dry etching?
Thanks
Kyunghoae
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Kyung-Hoae Koo
PhD candidate
EE department
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