Cu ALD or CVD

All:

 

I’m  looking desperately for sources for ALD or CVD copper depositions. Please let me know, if you know anyone who could help.

 

Thanks,

Rainer

 

 

Rainer Fasching, PhD

Cons. Associate Professor

Department of Mechanical Engineering

Stanford University

 

Mail: 440 Escondido Mall, Bldg. 530, Rm. 220, Stanford, CA 94305-3030

Email: rfasch@stanford.edu

Phone: 415-505-3385

Fax: 650-723-5034